Products
Diffuser Discs for LAM Autoetch and Rainbow Machines
ERG designs and manufactures a number of standardized aluminum foam discs that are used in several semiconductor processing machines made by Branson, LAM Research, Applied Materials and others. Our diffuser discs are used in CVD and etching research machines at leading universities as well. The following diffuser discs are always in stock and custom diffuser discs are available upon special request.| 5.495" | 5.985" | 7.985" | |
| LAM Machine | Auto Etch | Auto Etch | Rainbow |
| LAM P/N | 716-006446-001 | 716-008854-001 | 716-011505-001 |
| ERG P/N | 005-01-01-074, Rev A | 005-01-01-144, Rev A | 005-01-01-167, Rev A |
| Retail Price | $510.00 | $595.00 | $895.00 |
| Wholesale Price | $443.00 | $519.00 | $778.00 |
The LAM diffuser discs are commonly referred to as a diffuser disc, disc diffuser, or diffuser cathode and are manufactured from pure semiconductor certified aluminum alloy 6101. ERG is the OEM manufacturer of these parts for the LAM Autoetch and Rainbow machine. ERG has been the single source OEM supplier of these parts since 1975. As an end item user or foreign distributor you may purchase directly from ERG at the listed prices. Delivery can be next day air as ample parts are always in stock for off-the-shelf delivery. In quantities less than 10 each there is a slight price increase.
We have online literature that describes the function and benefits of using our Duocel foam in semiconductor manufacturing processes. Our diffuser discs are always in stock and next day delivery is common. Please contact us if you are interested in our products or if you have any questions about part availability or compatibility with your new or refurbished processing equipment. Please contact us today for a price quotation and delivery date. Thank you for using ERG's products.
