Gas Diffuser Discs

Duocel® aluminum foam is compressed and machined into discs which are used to improve the lateral dispersion of gases in CVD and dry etch machines. Flow dispersion acts to stabilize the flow velocity profile by minimizing lateral fluid velocity to reduce upstream cross flow and turbulence. The diffuser disk additionally acts as a plasma stabilizer and flame arrestor to mitigate back arcing. ERG Materials and Aerospace manufactures these discs as OEM standard products for a number of semiconductor equipment manufacturers. These standard products are available off our shelves for your order.